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* Specifications
| Measurement
principle |
Heat
conduction Pirani/ hot cathode (Bayard Alpert ionization sensor) |
| Gas dependency |
depending on gas type |
| Measurement range mbar |
1000
– 5e-10 mbar |
| Measurement range Torr |
750 – 5e-10 Torr |
| max. overload |
4 bar abs. |
| Accuracy |
1000 … 10 mbar: ca. 30 % f. r. | 10 … 1e-8 mbar: 10 %
f. r. |
| Repeatability |
10 – 1e-2 mbar: 2 % f. r. | 1e-2 – 1e-8 mbar: 5% f.
r. |
| Materials in contact with vacuum |
Stainl. steel 1.4307, tungsten, nickel, glass,
platinum, iridium, yttria oxide |
| Filaments / anodes |
Bayard Alpert: Yttria coated iridium |
| Emission current |
9 μA, 100 μA, 1.0 mA, 2,0 mA |
| Degas method |
Ohmic heating of the anode |
| Response time |
50 ms (switching of emission current < 2s) |
| Operating temperature |
5…60 °C (Profinet -5… +50 °C) |
| Storage temperature |
-40…+65 °C |
| Bake out temperature |
Max.
180°C at the flange (voltage supply switched-off) |
| Voltage supply |
20 – 30 VDC |
| Power consumption |
Max. 8 W, add. 1 W f. Degas, 0.8 W f. Relais/LCD,
add. 1.6 W f. Profinet |
| Output Singal SL |
0 – 10 VDC, min. 10 kΩ, measuring range 1,219 – 8,6
VDC, log. except EtherCAT, Profinet |
| Serial interface |
RS485:
9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity, EtherCAT, Profinet |
| Switching output |
2x relay, pot. free, 50 VAC / 2 A or 30 VDC / 2 A,
max. 60 VA, except EtherCAT and Profinet |
| Electrical connection |
RS485/0-10V:
SubD, 15-pole, male | RS485/EtherCAT/Profinet: 1x M12 A / 2x M12 D, female |
| Vacuum connection |
DN 25 ISO-KF (VSH87), DN 40 ISO-KF (VSH88), DN 40
CF-F (VSH89) |
| Vacuum connection |
DN 25 ISO-KF (VSH87), DN 40 ISO-KF (VSH88), DN 40
CF-F (VSH89) |
| Material Number: |
DN 25 ISO-KF (VSH87D), DN 25 ISO-KF (VSH87DL), DN 25 ISO-KF (VSH87E), DN 25 ISO-KF (VSH87PN), DN 40 CF-F (VSH89D), DN 40 CF-F (VSH89DL), DN 40 CF-F (VSH89E), DN 40 CF-F (VSH89PN), DN 40 ISO-KF (VSH88D), DN 40 ISO-KF (VSH88DL), DN 40 ISO-KF (VSH88E), DN 40 ISO-KF (VSH88PN) |
| Dimensions |
141 x 69 x 48 mm (VSH88) |
| Protection class |
IP40,
IP54 mit connector XB15SL05 |
| Weight |
475 g (VSH88) |
| 파일명 |
확장자 |
다운로드 |
| Art.-No. VSH-SL Series[Brochure].pdf (2MB) |
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상호 : 주식회사 마스 | (우)13209 경기도 성남시 중원구 사기막골로 45번길 14 우림2차 A-1610호
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Tel : 031-735-6310 / 6320
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Fax : 031-735-6334
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대표이사 / 개인정보관리책임자 : 안승만
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사업자등록번호 : 129-86-80575
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통신판매업등록번호 : 제2013-경기성남-0854호
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메일 : mmm@m-m.co.kr
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COPYRIGHT© MAS CO.,LTD. ALL RIGHTS RESERVED. |
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